JPH069007Y2 - 真空蒸着装置のシャッタ装置 - Google Patents
真空蒸着装置のシャッタ装置Info
- Publication number
- JPH069007Y2 JPH069007Y2 JP12949588U JP12949588U JPH069007Y2 JP H069007 Y2 JPH069007 Y2 JP H069007Y2 JP 12949588 U JP12949588 U JP 12949588U JP 12949588 U JP12949588 U JP 12949588U JP H069007 Y2 JPH069007 Y2 JP H069007Y2
- Authority
- JP
- Japan
- Prior art keywords
- shutter
- vapor deposition
- shutter blades
- blades
- vapor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000001771 vacuum deposition Methods 0.000 title description 2
- 238000007740 vapor deposition Methods 0.000 claims description 29
- 238000006073 displacement reaction Methods 0.000 claims description 11
- 238000000151 deposition Methods 0.000 description 12
- 230000008021 deposition Effects 0.000 description 12
- 239000000463 material Substances 0.000 description 6
- 230000008020 evaporation Effects 0.000 description 5
- 238000001704 evaporation Methods 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 4
- 230000005856 abnormality Effects 0.000 description 3
- 239000000126 substance Substances 0.000 description 3
- 239000012535 impurity Substances 0.000 description 2
- 238000005452 bending Methods 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949588U JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12949588U JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0251258U JPH0251258U (en]) | 1990-04-10 |
| JPH069007Y2 true JPH069007Y2 (ja) | 1994-03-09 |
Family
ID=31383823
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12949588U Expired - Lifetime JPH069007Y2 (ja) | 1988-09-30 | 1988-09-30 | 真空蒸着装置のシャッタ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH069007Y2 (en]) |
-
1988
- 1988-09-30 JP JP12949588U patent/JPH069007Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0251258U (en]) | 1990-04-10 |
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